Slightly smaller than Semifab RAM-E units, CD-E Remote Air Modules
ensure maximum process stability and controlled point-of-process environments
that support photo-resist coat, develop stations and other process modules requiring
stringent temperature and humidity control.
CD-E units deliver up to 750 CFM of controlled airflow through one to four outlets, while
sensors located in the production tool's enclosure provide signals for the CD-E
control loop. Deep UV, Low K and ULSI production, at 0.25-micron line-widths
and beyond are well within the performance sweet spot of Semifab CD-E Series
Air Control Modules.