TECU Series
Total Environmental Control Units

Semifab Total Environmental Control Units are the clear choice in situations where reduced cost, unified environmental control and floorspace limitations drive the hardware requirements. Semifab TECUs provide precision stability in controlled point-of-process tool environments as well as repeatable and efficient process cooling water control. Tool airflow from 1500 to 3500 CFM supports the rigorous requirements of most equipment enclosures while 29 KW of process cooling water keep your system temperatures under control.

Designed for addressing broader requirements than earlier generation PACM tools while minimizing footprint, Semifab TECUs are an integrated solution to many process tool requirements.