Medium Capacity ECU
CD precision air handlers ensure maximum process stability and controlled point-of-process environments that support photo-resist coat, develop stations and other process modules requiring stringent temperature and humidity control.
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Ramp to stabilization time of less than 20 minutes
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Up to four independently controlled air outlets on a single machine
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single pass or recirculating air flow
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full CE mark certification
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SEMI certification
Specifications
Airflow Capacity
Temperature Control Performance
Control Temperature Range
Ambient Temperature Range
Maximum Rate of Change
Humidity Control Performance
Humidity Control Range
Ambient Humidity Range
Maximum Rate of Change
100 to 750 CFM
As low as +/- 0.05 degrees C
20 to 25 degrees C
18 to 25 degrees C
1 degree C per 3 minutes
+/- 0.5% RH
35% to 50% RH
30% to 60% RH
1.0% RH per 3 minutes